WebOct 13, 2024 · Photocarrier radiometry (PCR) measured the carrier distribution of a p-type Si wafer at room temperature. Figure 1 shows PCR images taken at 5 kHz for two regions located at the central part of an S6 wafer. As can be seen, the PCR amplitude signal showed variations across the studied areas, indicating changes in the carrier distribution. WebApr 18, 2014 · The dependences of photocarrier radiometry amplitude on ion implantation dose (1 × 1011–1 × 1016/cm2), implantation energy (20–140 keV) and subsequent isochronical annealing temperature (500 ...
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WebMar 22, 2024 · In conventional photocarrier radiometry (PCR) used for characterizing the electronic transport properties of electronically thick silicon wafers, the rear SRV usually … WebJun 17, 2004 · The determination of the electronic transport properties of ion-implanted silicon wafers with the photocarrier radiometry (PCR) technique by fitting frequency scan data to a single layer model via a multiparameter fitting procedure is presented. A three-layer model is used to simulate the inhomogeneous structure of the ion-implanted wafers. The … biohorizons short implants
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WebApr 18, 2014 · The activation and recrystallization in arsenic ion-implanted silicon under excimer laser (193 nm) irradiation is investigated using photocarrier radiometry (PCR). Arsenic ion-implanted silicon wafers with a dose of $$1 \\times 10^{15}\\,\\mathrm{cm}^{-2}$$ 1 × 10 15 cm - 2 and an energy of 1 keV were irradiated at different laser parameters, … WebMar 15, 2015 · The U.S. Department of Energy's Office of Scientific and Technical Information WebSep 28, 2015 · In this paper, photocarrier radiometry (PCR) technique with multiple pump beam sizes is employed to determine simultaneously the electronic transport parameters (the carrier lifetime, the carrier diffusion coefficient, and the front surface recombination velocity) of silicon wafers. By employing the multiple pump beam sizes, the influence of ... biohorizons stock abutment